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Position-Tagged
Spectrometry:
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What
you need when you need to go back
One of the most
powerful aspects of Position-Tagged Spectrometry (PTS) is
its ability to retrieve new information from data taken previously.
An illustration of this concept was found in a specimen of
titania (TiO2) used as an electronic
ceramic. Although the PTS data were taken in the past, over
a year later new information was discovered to explain the
behavior of the material in service.
What
is PTS?
Position-tagged
Spectrometry is an X-ray spectroscopic method, whereby X-ray
photons generated by the scanning electron beam in an SEM
are tagged with the position of their origin. The computer
that controls the beam also receives the output of the X-ray
detector and combines the position of the beam with the measured
energy into one file. From that file, data can be extracted
to form images, maps, or spectra.
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| Specimen
Description |
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The
specimen shown in Figure 1 does not have a uniform
grain size. The ceramic was formed from a 0.5 micron powder
and was sintered at 1150° for one hour. One can see areas
in the microstructure that have only small particles, 0.5-2.0
micron in diameter, representing the original powder. In other
areas the grains have grown much larger. There is also some
porosity, and the dielectric constant of the material depends
on both grain size and porosity. Originally when the specimen
was first studied, it was thought that the lack of growth
of some particles reflected an inhomogeneous distribution
of the sintering agent (Bi2Ti2,O5).
However no bismuth was detected in X-ray maps nor in any specific
region of the material.
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Elemental
Map
Over a year later,
the investigators constructed spectra from various regions
of the microstructure from the data in a PTS file. In some
of these spectra, Mg, Si, Ca and traces of other elements
were found. On that basis, maps were created for these elements
long after the original session on the microscope.
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Figure 2 shows the maps along with a secondary electron
image of the uncoated specimen for comparison. It should be
noted that all maps and images reconstructed from PTS are
in perfect registry, because they come from the same file,
where all data are stored by pixel.
The maps show the distribution of Si, Mg, and Ca. The original
PTS file was collected in 15 minutes at 12,000 counts/second
at 8 kV on a field-emission SEM. Although all three elements
seem to be associated with regions that show a lack of grain
growth, they are not all present in the same places. With
PTS it is possible to construct an X-ray spectrum from any
region-no matter how the region is defined. For example, a
region could be defined as simply as a box drawn on the image
or as complexly as image processing allows. In this
case, a spectrum consisting of the sum of all pixels high
in silica is appropriate to show what type of contamination
is on the boundaries of the small grains.

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The Si map from
Figure 2 was used to create the spectra shown in Figure
3. The solid spectrum is from the entire region over which
the maps were collected. The line spectrum consists of the
sum of the spectra from all pixels containing the contamination.
Its height was normalized to the continuum of the first spectrum
for comparison. Note there are over 180,000 counts/full scale.
It is clear that the small particles are surrounded by a material
rich in silica.
Problem
Solved
It turns out that an organic binder containing Mg, Ca, and
Si was added in the amount of 1% to control the forming behavior
before firing, and it failed to burn out completely or uniformly.
As a consequence, the particles in some areas were prevented
from sintering with others, and this non-uniform grain structure
was the result, causing the anomalous dielectric properties.
Another problem
solved by PTS! Because the data were preserved in a PTS
file, information could be extracted later. With PTS, it is
possible to map any element or any region at any time during,
or after, collection. Moreover, it is routine to create spectra
from regions such as grain/particle boundaries, surfaces,
phases, etc., all with suitable statistics for further analysis.
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